Founded in 1980, EV Group (EVG) is a global supplier of wafer bonders, aligners, thin wafer-, temporary bonding and debonding-equipment, photoresist coaters, cleaners and inspection systems for semiconductor, MEMS and emerging nanotechnology markets. EV Group holds the dominant share of the market for wafer bonding and debonding equipment and is a leader in lithography for advanced packaging, MEMS and Nanoimprint Lithography (NIL).
SPTS Technologies designs, manufactures, sells, and supports etch, PVD, CVD and thermal capital equipment and process technologies for the global semiconductor and micro-device industries, with focus on the MEMS, advanced packaging, LED, high speed RF device and power management markets.
Applied Materials, Inc. is the global leader in providing innovative equipment, services and software to enable the manufacture of advanced semiconductor, flat panel display and solar photovoltaic products. Our technologies help make innovations like smartphones, flat screen TVs and solar panels more affordable and accessible to consumers and businesses around the world. 
Visit specific MEMS & sensor portfolio and product pages for the latest product information and design support including datasheets, evaluation boards, application notes, and design tools.


From Advanced Packaging to 3D Integration. SUSS MicroTec has been at the forefront of companies supporting the advanced packaging industry with dedicated lithography solutions. With the trend leading towards 3D architectures for IC integration and packaging, we support 3D Packaging and 3D Interconnect processes with precision equipment for thick resist and high topography applications, Through-Silicon-Via (TSV) manufacturing, bonding and de-bonding solutions, stacking technologies as well as products for the production of CMOS image sensors.
MEMS and Compound Semiconductor Manufacturing. With a full range of wafer-processing equipment and extensive experience in warped wafer handling solutions, SUSS MicroTec has positioned itself as the leader in high-volume Micro-Electro-Mechanical-Systems (MEMS) manufacturing. Our equipment is specifically designed to handle non-standard substrates like fragile compound semiconductors and incorporates specialized hardware such as coaters, aligners and bonders optimized for LED manufacturing.

ST has a strong focus on delivering solutions that help enrich people’s lives, make society work better, and protect the planet. The Company’s world-class products and technologies serve to:
- enable the convergence of multimedia and communication in smart consumer devices that help people interact anywhere, anytime;
- increase energy efficiency all along the energy chain, from power generation to distribution and consumption;
- provide all aspects of data security and protection;
- and contribute to helping people live longer and better by enabling emerging healthcare and wellness applications.
Beginning in 1998 with Yole Développement, we have expanded to a group of companies providing market research, technology analysis, strategy consulting, media, and financial services. Yole Développement group has grown to more than 50 associates worldwide covering emerging and disruptive silicon and micro manufacturing markets including MEMS, medical technologies (including Microfluidics and BioMEMS), advanced packaging, compound semiconductors, power electronics, LEDs, and photovoltaics. The group supports companies, investors and R&D organizations worldwide in understanding markets and following technology trends to grow their businesses.

MMIPI Alliance is a global organization comprised of companies that span the mobile ecosystem and are committed to defining and promoting interface specifications for mobile devices. MIPI Specifications establish standards for hardware and software interfaces which drive new technology and enable faster deployment of new features and services. For more information, visit www.mipi.orgMIPI Alliance recently formed the Sensor Birds of a Feather (BoF) Group, open to MIPI member and non-member companies. The Sensor BoF recently held its inaugural face-to-face meeting, where the group discussed the requirements related to integrating sensor devices in mobile systems. To join the Sensor BoF group, visit https://isto.wufoo.com/forms/mipi-alliance-sensor-birds-of-a-feather
We’re a global innovator in 75mm - 200mm equipment and services to the LED, MEMS, wireless, power, energy harvesting, WLP, data storage, and logic markets. Our LEGENDS™ family of products includes the Tegal 900ACS™-Series and 6500™-Series (thin-film etch), Sputtered Films Endeavor™ (PVD), AMS™ (PVD), MRC Eclipse (PVD), AG Heatpulse® (RTP), Varian Sunset (implant), and Lam AutoEtch™ product lines. And within LEGENDS, and as part of our new Chemical Process Technology™ group, we now offer Cintillio™, Scepter, Sirius, Spin-Rinse Dryer, Spray Acid Tool, Spray Solvent Tool and Storm as the result of our May 2011 purchase of Rhetech and Semitool Austria GmbH manual batch tool sales and service operations from Applied Materials.
The company builds reliable supply chains for delivery of MEMS ranging from wafers to custom components, but also supports earlier phases of projects where prototyping is required.
Founded in 1997, Tronics has 14 years of experience in developing, manufacturing and packaging accelerometers, gyroscopes, micropumps, pressure sensors, switches, biodetectors and many more MEMS.
MEMS Technology Showcase Sponsor
Movea is the leading provider of data fusion and motion processing firmware, software, and IP for the consumer electronics industry. Thriving on its portfolio of more than 440 patents, Movea's licenses our unique SmartFusion™ technologies to customers in three primary markets: mobile, Interactive TV, and sports. Our platform of data fusion engines, developer tools and data models enable our customers and partners to quickly and easily add interactivity and awareness to their products. As a result, our customers can reduce the risk, cost, and time-to-market for delivering compelling new features that differentiate their products, enhance the consumer experience, and deliver more end-user value.The growth of interactive entertainment, mobility and cloud computing is driving significant convergence across diverse markets and enormous demand for new data fusion features in a wide range of applications: mobile device control, indoor navigation, home entertainment, tennis, golf, wellness, gaming and many more. With deep experience in sensors, signal processing, human motion and human-device interaction, Movea is strategically positioned as a technology provider to OEMs systems integrators, and semiconductor vendors, enabling our customers to capitalize on the growing market demand for new levels of intelligence, interactivity and ease-of-use.
Movea SmartFusion processing algorithms and IP are the main ingredients for the company’s solutions. We are able to mix and combine these fundamental elements through a data fusion “chemistry”. This Chemistry of SmartFusion enables rapid prototyping of new features by combining atomic building blocks into molecules of richer, more complex features.
Products & Services
Movea’s product offerings include: SmartMotion® for Interactive TV, MotionCore™ firmware for mobile, and MoveFit™ for sports and wellness. These solutions, combined with our developer tools and data models, enable customers to easily integrate advanced capabilities like motion processing, context awareness, activity monitoring and data fusion into their products. Building on Movea’s SmartFusion technologies transforms the user experience – providing a natural, intuitive way to interact with your devices through movement, gestures, activity monitoring, contextual awareness, indoor navigation and more – and opens new revenue streams for OEM’s and service providers by adding differentiating features that dramatically enhance the User Expereince and increase customer loyalty. Visit www.movea.com for further details.
Movea has a global reach with headquarters in Grenoble, France, a US subsidiary in Silicon Valley, California, as well as technology partners, manufacturing partners and distributors around the world.
Maxim is a world-wide leader in the design, development and manufacture of the analog and mixed-signal devices that enable all four of these key interactions. Markets Served: Maxim’s products are used in a wide variety of microprocessor-based electronics equipment including consumer products, personal computers and peripherals, handheld electronics, wireless and fiber communications, test equipment, instrumentation, video displays, and automotive applications.
X-FAB MEMS Foundry offers unsurpassed experience, expertise and execution with its high-volume MEMS manufacturing service. The first ever pure-play MEMS foundry, X-FAB draws on more than 15 years MEMS manufacturing experience and continues to meet the new demands for this rapidly expanding and exciting group of technologies in terms of time to market, quality assurance, high yield and supply-chain management tools. To discover how X-FAB MEMS Foundry can make the winning difference to your MEMS and CMOS sensor business, please visit. www.xfab.com.
Networking Lunch Sponsor
Kionix, Inc., located in Ithaca, New York, USA, is a globally recognized MEMS inertial sensor manufacturer, offering high-performance, low-power accelerometers, gyroscopes, and combination sensors, as well as comprehensive software libraries that support a full range of sensor combinations, operating systems and hardware platforms. Leading companies worldwide utilize Kionix sensors and total system solutions to enable motion-based functionality in their consumer electronics, automotive, healthcare, and industrial products. Kionix is a wholly owned subsidiary of ROHM Co., Ltd. of Japan and is ISO 9001:2008 and TS16949 certified.
Plan Optik AG, a high tech glass processor, existing since 1972 and based in Germany, has focused more and more on MEMS related products from glass or similar materials (mainly borosilicate glass wafers used for wafer level packaging of MEMS). 
Founded in 2003, A.M. Fitzgerald & Associates, LLC is a MEMS product development firm that provides services in MEMS prototyping and short-run fabrication, multiphysics finite element modeling and fracture prediction, foundry selection and technology transfer, and technology strategy consulting.
Fries Research & Technology GmbH (FRT) offers a comprehensive range of metrological surface measuring systems for the non-destructive investigation of topography, profile, film thickness, roughness, abrasion and many other properties. More than 400 reputable international companies from the automotive, semiconductor, MEMS, optical, photovoltaic and many other industries equip their R&D and production departments with FRT metrology systems.FRT operates from Bergisch Gladbach, Germany and maintains subsidiaries in China, Switzerland and the United States. Additionally, FRT provides a distribution and service network in the USA, Asia and Europe.
IntelliSense ignited the MEMS industry in the early 1990’s with its IntelliSuite® family of innovative CAD tools and is now a leading innovator and supplier of design and development solutions for the MEMS professional. With users in more than 35 countries, IntelliSense offers software tools and custom design, consulting, fabrication, and market research services to universities, blue-chip companies and start-ups worldwide. With a broad range of services and strategic partnerships throughout the supply chain, IntelliSense truly provides a one-stop MEMS solution.
Maxim is a world-wide leader in the design, development and manufacture of the analog and mixed-signal devices that enable all four of these key interactions. Markets Served: Maxim’s products are used in a wide variety of microprocessor-based electronics equipment including consumer products, personal computers and peripherals, handheld electronics, wireless and fiber communications, test equipment, instrumentation, video displays, and automotive applications.
For more information, visit: www.maximintegrated.com
Oxford Instruments Plasma Technology offers flexible, configurable process tools and leading-edge processes for the precise, controllable and repeatable engineering of micro- and nano-structures. Our systems provide process solutions for nanometre layer epitaxial growth of compound semiconductor material, etching of nanometre sized features and the controlled growth of nanostructures. These solutions are based on core technologies in plasma-enhanced deposition and etch, ion-beam deposition and etch, atomic layer deposition and deep silicon etch. Products range from compact stand-alone systems for R&D, through batch tools and up to clustered cassette-to-cassette platforms for high-throughput production processing.
The MEMS and Nanotechnology Exchange (MNX) provides design and fabrication services to the U.S. research community. Our engineers offer a complete range of technical support to assist researchers who need a trusted partner at any project phase, including early-stage development, design and modeling, prototype fabrication and low-volume manufacturing. Since 1999, MNX has completed more than 2400 customized process sequences for over 900 organizations.
Imec performs world-leading research in nanoelectronics. Imec leverages its scientific knowledge with the innovative power of its global partnerships in ICT, healthcare and energy. Imec delivers industry-relevant technology solutions. In a unique high-tech environment, its international top talent is committed to providing the building blocks for a better life in a sustainable society. Imec is headquartered in Leuven, Belgium, and has offices in Belgium, the Netherlands, Taiwan, US, China, India and Japan. Its staff of about 1,900 people includes more than 500 industrial residents and guest researchers. In 2010, imec's revenue (P&L) was 285 million euro.
Solid State Technology’s magazine, e-Newsletters and website are seen by 273,000+ engineering and management professionals in 181 countries each month—more than any other electronics manufacturing-focused media provider delivers. These influential professionals have relied on Solid State Technology for more than 55 years. And as markets such as MEMS have emerged, we have become a primary resource for those decision makers as well.In Solid State Technology Magazine, our MEMS direct e-Newsletter and the MEMS channel on our website (www.solid-state.com/mems), we focus on MEMS manufacturing and packaging challenges and new integrationstrategies.
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