EUVL Symposium
 
 Conference Chairs

Kurt Ronse

imec

Conference Chair

Paolo Gargini

Stanford University       

Conference Co-Chair

Toshiro Itani

EIDEC

Conference Co-Chair

Stefan Wurm

SEMATECH

Conference Co-Chair



Program Chairs

Eric Hendrickx

imec

Program Chair

Satoshi Tanaka

EIDEC

Program Co-Chair

Winfried Kaiser

Carl Zeiss SMT

Program Co-Chair

Patrick Naulleau

LBNL

Program Co-Chair



Program Steering Committee

Jinho Ahn                         

Hanyang University

Alek Chen                      

ASML

Hanku Cho                    

Samsung

Daniel Corliss               

IBM

Kevin Cummings        

SEMATECH

Paolo Gargini                

Stanford University/IEUVI

Janice Golda            

Intel

Frank Goodwin        

SEMATECH

Eric Hendrickx        

imec

Soichi Inoue            

Toshiba

Toshiro Itani          

EIDEC

Winfried Kaiser        

Carl Zeiss SMT

Kunihiko Kasama    

Ushio

Hidemi Kawai

Nikon

Seong-Sue Kim

Samsung

Chiew-seng Koay

IBM

Takahiro Kozawa

Osaka University

Chris Krautschik

Intel

Bruno La Fontaine

ASML

Sang Hun Lee

Intel

Changmoon Lim

SK Hynix

Akira Miyake

Canon

Ichiro Mori

EIDEC

Patrick Naulleau

LBNL

Katsunobu Nishihara

Osaka University

Iwao Nishiyama

Kyushu Institute of Technology

Rudy Peeters

ASML      


Abbas Rastegar 

AMAT

Kurt Ronse

imec

Yumiko Takamori

IEUVI

Serge Tedesco

CEA-Leti

Takayuki Uchiyama

Toshiba

Geert Vandenberghe

Imec

Hidehiro Watanabe

EIDEC

Obert Wood

GLOBALFOUNDRIES

Stefan Wurm

SEMATECH

Anthony Yen

TSMC